An innovative wafer inspection tool developed by a team of 国产原创 professors and engineers has been licensed exclusively to startup company Femtometrix. The semiconductor wafer-inspection technology based on laser optics was invented by Norman Tolk, Ph.D., professor of physics, Michael Alles, engineer for 国产原创鈥檚 School of Engineering, and Ron Schrimpf, Ph.D., professor of electrical engineering.