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HDMS Oven

YES-310TA

Overview

YES Oven

The YES-310TA oven is a vapor-prime and image reversal oven from Yield Engineering Systems.聽 The YES-310TA oven uses hexamethyldisilazane (HMDS) to vapor prime for improved photoresist adhesion to non-organic samples.聽 Ammonia can be used for image reversal to reverse the tone of positive photoresists upon request.

Capabilities

  • Maximum sample size: 200 mm or 7.8 inches
  • Chamber size: 12鈥漻 13.25鈥漻 12鈥�
  • Operation temperature: 30掳C to 160掳C
  • Gases: N2., NH3, HMDS vapor
  • Two vapor prime loads per hour; one image reversal image load per hour
  • Temperature uniformity: 卤 5掳C after stabilization period
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Contact

  • VINSE Cleanroom

    VINSE Cleanroom

    Dr. Ben Schmidt, Manager

    Dr. Christina McGahan
    Megan Dernberger

    • 111 Engineering Science Building

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